



| Items | Description |
|---|---|
| Process Gas | Ar/O2/N2 |
| Process Speed | 10~80mm/s (30mm/s) |
| AP Plasma Unit | ·Plasma Module Electrode Headset : 810mm x 90mm x 60mm Scan Width: 800mm Metal Body : Anodized Al ·Power Supply: 1,000W |
| Dimension (W x L x H) | 2,500 x 1,400 x 1,600 mm |
| Jig Size | 800 x 700 mm |